Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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|colspan="9" style="text-align: center;" style="background: #efefef;" | '''Details for each experiment''' | |colspan="9" style="text-align: center;" style="background: #efefef;" | '''Details for each experiment''' | ||
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!width=" | !width="25%" |Sample ID | ||
!width="15%" |Gas | !width="15%" |Gas | ||
!width="15%" |Flow (SCCM) | !width="15%" |Flow (SCCM) | ||