Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
| Line 169: | Line 169: | ||
|0.18 | |0.18 | ||
|180 | |180 | ||
|No | |||
|Up | |||
|- | |||
!RTA 7 | |||
|Ar | |||
|40 | |||
|1246 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |||
|Flipped | |||
|- | |||
!RTA 8 | |||
|Ar | |||
|40 | |||
|1248 | |||
|80 | |||
|0.18 | |||
|60 | |||
|Yes | |||
|Flipped | |||
|- | |||
!RTA 9 | |||
|Ar | |||
|40 | |||
|1244 | |||
|80 | |||
|0.18 | |||
|60 | |||
|No | |No | ||
|Up | |Up | ||