Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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The structural characterization was mainly carried out by scanning electron microscopy, although ellipsometry has also been used. The scanning electron microscope (SEM) was a Zeiss Supra 40VP SEM, serial number 4825 and the ellipsometer a variable angle spectroscopic ellipsometry (VASE) M2000XI-210 from J.A. Woollam Co., Inc. | The structural characterization was mainly carried out by scanning electron microscopy, although ellipsometry has also been used. The scanning electron microscope (SEM) was a Zeiss Supra 40VP SEM, serial number 4825 and the ellipsometer a variable angle spectroscopic ellipsometry (VASE) M2000XI-210 from J.A. Woollam Co., Inc. | ||
=== | ===Processes in detail=== | ||
==== Argon RTA ==== | |||
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