Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma DUV processing: Difference between revisions
| Line 24: | Line 24: | ||
|- | |- | ||
| | | | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | ||
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] | *[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] - '''requires login''' | ||
{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||
| Line 78: | Line 78: | ||
|- | |- | ||
| | | | ||
*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper]<br> | *[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper] - '''requires login'''<br> | ||
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] | *[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] - '''requires login''' | ||
{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||