Specific Process Knowledge/Lithography/Coaters/Spin Coater: Gamma DUV processing: Difference between revisions
Created page with "=General Process Information= Processing using Spin Coater: Süss stepper is divided into two parts: *Spin coating *Soft baking ==Spin coating== The process of spin coating on Spin Coater: GSüss stepper consists of a selection of the following steps: *Acceleration to a low spin speed if dynamic dispense is used *Resist dispense *Spin-off The wafer is first centered on the spindle chuck and held in place by vacuum. If static dispense is specified in the process, the sp..." |
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=Quality Control (QC)= | =Quality Control (QC)= | ||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality Control (QC) for Spin coater: Süss Stepper - BARC DUV42S-6''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper]<br> | |||
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
! QC Recipe: | |||
! (1201) DCH 150mm BARC 65nm | |||
|- | |||
|Substrate size | |||
|6" | |||
|- | |||
|Resist volume | |||
|3 ml | |||
|- | |||
|Spin-off speed | |||
|4700 rpm | |||
|- | |||
|Spin-off time | |||
|30 s | |||
|- | |||
|Soft bake temperature | |||
|175°C, contact | |||
|- | |||
|Soft bake time | |||
|60 s | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
!QC limits | |||
!Spin coater: Süss Stepper - BARC DUV42S-6 | |||
|- | |||
|Nominal film thickness | |||
|65 nm | |||
|- | |||
|Film thickness deviation from nominal | |||
|<15% | |||
|- | |||
|Film thickness non-uniformity | |||
|<5% | |||
|- | |||
|} | |||
|- | |||
|} | |||
Spin-off speed will be adjusted if film thickness is outside the limit. | |||
|} | |||
{| border="1" cellspacing="2" cellpadding="2" colspan="3" | |||
|bgcolor="#98FB98" |'''Quality Control (QC) for Spin coater: Süss Stepper - BARC DUV42S-6''' | |||
|- | |||
| | |||
*[http://labmanager.dtu.dk/d4Show.php?id=5123&mach=279 The QC procedure for Spin coater: Süss Stepper]<br> | |||
*[http://labmanager.dtu.dk/view_binary.php?fileId=4212 The newest QC data for Spin coater: Süss Stepper] | |||
{| {{table}} | |||
| align="center" | | |||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
! QC Recipe: | |||
! (1202) DCH 100mm BARC 65nm | |||
|- | |||
|Substrate size | |||
|4" | |||
|- | |||
|Resist volume | |||
|1.6 ml | |||
|- | |||
|Spin-off speed | |||
|3000 rpm | |||
|- | |||
|Spin-off time | |||
|30 s | |||
|- | |||
|Soft bake temperature | |||
|175°C, contact | |||
|- | |||
|Soft bake time | |||
|60 s | |||
|- | |||
|} | |||
| align="center" valign="top"| | |||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:400px" | |||
!QC limits | |||
!Spin coater: Süss Stepper - BARC DUV42S-6 | |||
|- | |||
|Nominal film thickness | |||
|65 nm | |||
|- | |||
|Film thickness deviation from nominal | |||
|<15% | |||
|- | |||
|Film thickness non-uniformity | |||
|<5% | |||
|- | |||
|} | |||
|- | |||
|} | |||
Spin-off speed will be adjusted if film thickness is outside the limit. | |||
|} | |||
=Standard Processes= | =Standard Processes= | ||