Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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'''Pre-cleanroom work:''' | '''Pre-cleanroom work:''' | ||
#'''Complete the TPT Lithography course''': [[LabAdviser/Courses/TPT_Lithography|Lithography Tool Package Training]]. | #'''Complete the TPT Lithography course''': [[LabAdviser/Courses/TPT_Lithography|Lithography Tool Package Training]]. | ||
#'''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/Resist/UVresist|in this table]]</u>. | #'''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/Resist/UVresist#UV_resist_comparison_table|in this table]]</u>. | ||
#'''Design device''': Design your device and layout. A detailed instruction on how to design a layout (mask) can be found <u>[[Specific_Process_Knowledge/Pattern_Design|here]]</u>. | #'''Design device''': Design your device and layout. A detailed instruction on how to design a layout (mask) can be found <u>[[Specific_Process_Knowledge/Pattern_Design|here]]</u>. | ||
#'''Mask''': If you wish to use a mask aligner, order a photomask for your UV process. Instructions on how to order a photomask can be found <u>[[Specific_Process_Knowledge/Pattern_Design#Mask_Ordering_and_Fabrication|here]]</u>. | #'''Mask''': If you wish to use a mask aligner, order a photomask for your UV process. Instructions on how to order a photomask can be found <u>[[Specific_Process_Knowledge/Pattern_Design#Mask_Ordering_and_Fabrication|here]]</u>. | ||