Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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* '''Complete the TPT Lithography course''': [[LabAdviser/Courses/TPT_Lithography|Lithography Tool Package Training]]. | * '''Complete the TPT Lithography course''': [[LabAdviser/Courses/TPT_Lithography|Lithography Tool Package Training]]. | ||
* '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/ | * '''Prepare a process flow''' which describes all steps in your UV lithography process. You can find docx-templates <u>[[Specific_Process_Knowledge/Lithography/Resist/UVresist|in this table]]</u>. | ||
* '''Design device''': Design your device and layout. A detailed instruction on how to design a layout (mask) can be found <u>[[Specific_Process_Knowledge/Pattern_Design|here]]</u>. | * '''Design device''': Design your device and layout. A detailed instruction on how to design a layout (mask) can be found <u>[[Specific_Process_Knowledge/Pattern_Design|here]]</u>. | ||