Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*Single-wafer process | *Single-wafer process | ||
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|style="background:LightGrey; color:black"| | |style="background:LightGrey; color:black"|Substrate size | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*100 mmm or 150 mm wafers | *100 mmm or 150 mm wafers | ||