Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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*FEG (Field Emission Gun) source | *FEG (Field Emission Gun) source | ||
|- | |- | ||
|style="background:LightGrey; color:black"|5% H<sub>2< | |style="background:LightGrey; color:black"|5% H<sub>2</sub>/Ar | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Fixed at High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar) | *Fixed at High vacuum (2 × 10<sup>-4</sup>mbar - 10<sup>-6</sup>mbar) | ||