Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Specifics | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Specifics | ||
|style="background:WhiteSmoke; color:black;"align="center"|<b>Allowed</b> | |style="background:WhiteSmoke; color:black;"align="center"|<b>Allowed</b> | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Temperature | |||
|style="background:LightGrey; color:black"|Imaging and measurement of | |||
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* Conducting samples | |||
* Semi-conducting samples | |||
* Thin (~ 5 µm <) layers of non-conducting materials such as polymers | |||
* Thick polymers, glass or quartz samples | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Process gas | !style="background:silver; color:black" align="center" valign="center" rowspan="1"|Process gas | ||