Specific Process Knowledge/Thermal Process/RTP Annealsys: Difference between revisions
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==Samples and Process Specifications== | ==Samples and Process Specifications== | ||
The rapid thermal processor, with a base pressure of 10 | The rapid thermal processor, with a base pressure of 10<sup>-6 mbar, is a research tool. As such, there are some parameters and details to consider. | ||
{| border="1" style="text-align: center; width: 320px; height: 200px;" | {| border="1" style="text-align: center; width: 320px; height: 200px;" | ||