Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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|+ '''Table: nanoholes + isotropic etch from | |+ '''Table: nanoholes + isotropic etch from June 2022''' | ||
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! rowspan="1" align="center"| | ! rowspan="1" align="center"| | ||