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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions

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Mfarin (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
781 edits
Mfarin (talk | contribs)
NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
781 edits
Line 88: Line 88:
| '''O-step''' || 10 || 220 mTorr || 200 || 0 || 40
| '''O-step''' || 10 || 220 mTorr || 200 || 0 || 40
|-
|-
| '''R-step''' || 10 || 100% || 0 || 40 || *
| '''R-step''' || 10 || 100% || 0 || 40 || 40
|-
|-
| '''E<sub>1</sub>-step''' || 2 || 220 mTorr || 0 || 350 || 0
| '''E<sub>1</sub>-step''' || 2 || 220 mTorr || 0 || 350 || 40
|-
|-
| '''E<sub>2</sub>-step''' || 0-15 || 220 mTorr || 0 || 350 || 100-300
| '''E<sub>2</sub>-step''' || * || 220 mTorr || 0 || 350 || 300
|} ''*The R-power value was changed and observed.''
|} ''*The E<sub>2</sub>-time value was changed and observed.''


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