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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions

Mfarin (talk | contribs)
Mfarin (talk | contribs)
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The most suitable removal power was 40 W, removing the bottom of the profile correctly without damaging the top part of the profile.
The most suitable removal power was 40 W, removing the bottom of the profile correctly without damaging the top part of the profile.