Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 101: | Line 101: | ||
|- | |- | ||
| R-step | | R-step | ||
| | | 10 | ||
| 100% | |||
| 0 | |||
| 0 | |||
| 40 | |||
| 0 | |||
|- | |- | ||
| E<sub>1</sub>-step | | E<sub>1</sub>-step | ||
| | | 2 | ||
| 220 mTorr | |||
| 0 | |||
| 350 | |||
| 0 | |||
| 0 | |||
|- | |- | ||
| E<sub>2</sub>-step | | E<sub>2</sub>-step | ||
| | | 0-15 | ||
| 220 mTorr | |||
| 0 | |||
| 350 | |||
| 100-300 | |||
| 0 | |||
|- | |- | ||
! rowspan="3" align="center"| Isotropic etch | ! rowspan="3" align="center"| Isotropic etch | ||