Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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|+ 1μm holes recipe from March 2022 - #288 = 120 min | |+ 1μm holes recipe from March 2022 - #288 = 120 min | ||
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=== Nanoholes === | === Nanoholes === | ||