Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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! !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) !! Profile | ! !! Time (s) !! Pressure (valve control) !! O<sub>2</sub> flow (SCCM) !! SF<sub>6</sub> flow (SCCM) !! Platen power (W) !! Profile | ||
|- | |- | ||
| '''O-step''' || 10 || 3% || 200 || 0 || 40 | | '''O-step''' || 10 || 3% || 200 || 0 || 40 || | ||
|- | |- | ||
| '''R-step''' || 10 || 100% || 0 || 5 || 40 | | '''R-step''' || 10 || 100% || 0 || 5 || 40 || | ||
|- | |- | ||
| '''E<sub>1</sub>-step''' || 2 || 4% || 0 || 350 || 40 | | '''E<sub>1</sub>-step''' || 2 || 4% || 0 || 350 || 40 || | ||
|- | |- | ||
| '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 || | | '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 || | ||
|- | |||
| ''' ''' || || || || || || | |||
|[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | |[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | ||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||
=== Holes === | === Holes === | ||