Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
| Line 30: | Line 30: | ||
| '''E<sub>1</sub>-step''' || 2 || 4% || 0 || 350 || 40 | | '''E<sub>1</sub>-step''' || 2 || 4% || 0 || 350 || 40 | ||
|- | |- | ||
| '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 | | '''E<sub>2</sub>-step''' || 7 || 4% || 0 || 350 || 300 || | ||
[[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | [[File:compare pillars.png|400px|thumb|'''''Pillars with different etching times.''''']] | ||
|} | |} | ||