Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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[[File:17.6 holes.png|400px|thumb|'''''17.6 μm holes profile.''''']] | [[File:17.6 holes.png|400px|thumb|'''''17.6 μm holes profile.''''']] | ||
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=== Nanoholes === | === Nanoholes === | ||