Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/ORE with Al2O3 mask: Difference between revisions
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As stated by [https://labadviser.nanolab.dtu.dk/images/5/5c/The_CORE_sequence.pdf Nguyen et al.], the SF6 and O2 fluxes are only separated after 4 s during the C-step, so shorter times than that do not execute the clearing step correctly. After testing the same recipe with only 1 s or without the C-step, it was understood it could be eliminated, showing more deepth as well as less undercut. | |||
From then on, not CORE but ORE recipes were applied (D/E = O/RE). | |||
Revision as of 15:38, 17 January 2023
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As stated by Nguyen et al., the SF6 and O2 fluxes are only separated after 4 s during the C-step, so shorter times than that do not execute the clearing step correctly. After testing the same recipe with only 1 s or without the C-step, it was understood it could be eliminated, showing more deepth as well as less undercut. From then on, not CORE but ORE recipes were applied (D/E = O/RE).