Specific Process Knowledge/Thin film deposition/Deposition of Tungsten: Difference between revisions
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*[[/DC Sputtering of W in Sputter-system Metal-Nitride (PC3)|DC Sputtering of Tungsten in the Sputter-system Metal-Nitride (PC3)]] | *[[/DC Sputtering of W in Sputter-system Metal-Nitride (PC3)|DC Sputtering of Tungsten in the Sputter-system Metal-Nitride (PC3)]] | ||
*[[/HiPIMS Sputtering of W in Sputter-system Metal-Nitride (PC3)|HiPIMS Sputtering of Tungsten in the Sputter-system Metal-Nitride (PC3)]] | *[[/HiPIMS Sputtering of W in Sputter-system Metal-Nitride (PC3)|HiPIMS Sputtering of Tungsten in the Sputter-system Metal-Nitride (PC3)]] | ||
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