Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 03 processing: Difference between revisions
| Line 147: | Line 147: | ||
|-style="background:LightGrey; color:black" | |-style="background:LightGrey; color:black" | ||
!AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | !AZ 5214E image reversal<br><span style="color:green">New Japanese version</span> | ||
| | | 2023-01-06<br>taran | ||
| 2.2 µm | | 2.2 µm | ||
| 405 | | 405 | ||
| Pneumatic | | Pneumatic | ||
| Quality | | Quality | ||
| | | 50 mJ/cm<sup>2</sup> | ||
| | | -2 | ||
| 1.75 µm | | 1.75 µm | ||
| Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | | Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | ||