Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Difference between revisions
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Tantalum can be deposited by e-beam assisted evaporation in the Temescal tool. | Tantalum can be deposited by e-beam assisted evaporation in the Temescal tool. | ||
*[[/Ta Ebeam evaporation in Temescal |E-beam evaporation of Ta in Temescal]] | *[[/Ta Ebeam evaporation in Temescal |E-beam evaporation of Ta in Temescal]] | ||
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