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| Line 108: |
Line 108: |
| |Removing dust, traces of organics and alkali ions and slightly polish the surface. | | |Removing dust, traces of organics and alkali ions and slightly polish the surface. |
| Make the surface hydrophillic | | Make the surface hydrophillic |
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| |}
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| {| class="wikitable hideable hidden" border="1" cellspacing="1" cellpadding="2" align="left" width="430px"
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| !colspan="3" style="text-align:left;" | [[image:Dry your sample.png|x130px|Dry your sample]] Dry your sample
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| !Entry page in LabAdviser
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| !Techniques
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| !Materials
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| |rowspan="4" valign="top" |[[Specific Process Knowledge/Wafer and sample drying|Wafer and sample drying]]
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| |Spin dryers
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| |Whole wafers
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| |-
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| |Critial point dryer
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| |Sensitive wafers
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| |-
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| |Ethanol fume drying
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| |Sensitive wafers
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| |-
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| |N2 blow drying
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| |N2 pistols
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| |- | | |- |
| |} | | |} |
