Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch: Difference between revisions
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<gallery caption="Map of etch rate measurements" widths=" | <gallery caption="Map of etch rate measurements" widths="300px" heights="300px" perrow="2"> | ||
File:contour plot for etchrate of slow etch in SiO2.JPG| Etch rate map of SiO2 etch on 6" wafer | File:contour plot for etchrate of slow etch in SiO2.JPG| Etch rate map of SiO2 etch on 6" wafer | ||
File:contour plot for etchrate of slow etch in SRN.JPG| Etch rate map of SRN etch on 6" wafer | File:contour plot for etchrate of slow etch in SRN.JPG| Etch rate map of SRN etch on 6" wafer | ||
</gallery> | </gallery> | ||