Specific Process Knowledge/Etch/Overview of chemicals: Difference between revisions

|-

!style="background:silver; color:black;" align="left"|Acetone

!style="background:LightGrey; color:black;"|99,8%-100%

!style="background:WhiteSmoke; color:black"|

|-

!style="background:silver; color:black;" align="left"|Ammoniumhydroxyd

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|28%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Ammoniumperoxodisulfat

!style="background:LightGrey; color:black;"|98%-99,1%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Anisole Anhydrous

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|99,7%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AR-600-546 Developer

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AR-600-71 Remover

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AR-6200.09 E-beam resist

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ 351B Developer

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ 4562 Photoresist

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ 5214E Photoresist

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ 726MIF developer

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ 726MIF developer (Tromle)

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ MiR 701 (29CPS) Photoresist

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|AZ nLOF 2020 Photoresist

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Boric Acid powder

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Chrome etch 18

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Developer MIBK Methylisobutylketon 4L

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|DUV42S-6,4 L ultra nowpak W/Closure lid

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Ethanol

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|99,9%-100%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE)

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|12,5%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Hydrofluoric acid buffer (BHF/BOE W/wetting agent)

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|12,5%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Hexamethyldisilasan

!style="background:LightGrey; color:black;"|Cas Nr.  

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black" align="left" valign="top" rowspan="4"|HYDROFLUORIC ACID (HF)

|style="background:LightGrey; color:black"|1%

|-

!style="background:LightGrey; color:black;"|Cas Nr.

|style="background:LightGrey; color:black"|10%

|-  

!style="background:LightGrey; color:black;"|Cas Nr.

|style="background:LightGrey; color:black"|40%

|-

!style="background:LightGrey; color:black;"|Cas Nr.

|style="background:LightGrey; color:black"|50%

|-

!style="background:silver; color:black;" align="left"|Hydrochloric acid

!style="background:LightGrey; color:black;"|37%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Hydrogenperoxid

!style="background:LightGrey; color:black;"|31%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|KRF m230Y 6cP Gal

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|KRF M35G 27cP Gal

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Microposit Remover 1165  

!style="background:LightGrey; color:black;"|not specific

!style="background:LightGrey; color:black;"|Grade

!style="background:silver; color:black;" align="left"|Nitric acid  

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|69%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Ortho-Phosphoric acid

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|85%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Potassium hydroxide solution

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Propanol

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|SU-8 2005

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|SU-8 2035

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|SU-8 2075

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|SU-8 Developer (Mr-dev 600)

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|SU-8 Thinner

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Sulfamic acid  

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Sulfuric acid  

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|95%-97%

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|TI spray  

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|ZED N50

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

!style="background:silver; color:black;" align="left"|Triton x-100

!style="background:LightGrey; color:black;"|Cas Nr.

!style="background:LightGrey; color:black;"|not specific

!style="background:WhiteSmoke; color:black"|Comment

|-

|}