Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
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<gallery caption="After Cr etch | <gallery caption="After Cr etch with recipe 13 and nitride etch in the AOE 20s" widths="400px" heights="300px" perrow="2"> | ||
Image:Cr-75s_sin-met-20s_0733.jpg | Image:Cr-75s_sin-met-20s_0733.jpg| 75s Cr etch | ||
Image:Cr-90s_sin-met-20s_0757.jpg| 90s Cr etch | |||
</gallery> | </gallery> | ||