Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions
Appearance
| Line 75: | Line 75: | ||
|} | |} | ||
<gallery caption="After Cr etch 75s with recipe 13 and nitride etch in the AOE 20s" widths=" | <gallery caption="After Cr etch 75s with recipe 13 and nitride etch in the AOE 20s" widths="400px" heights="300px" perrow="2"> | ||
Image:Cr-75s_sin-met-20s_0733.jpg | Image:Cr-75s_sin-met-20s_0733.jpg | ||