Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
| Line 182: | Line 182: | ||
| Optical | | Optical | ||
| Fast | | Fast | ||
| 16 mJ/cm<sup>2</sup> | | <s>16 mJ/cm<sup>2</sup></s> | ||
| -4 | | <s>-4</s> | ||
| 1.75 µm | | <s>1.75 µm</s> | ||
| Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | | Reversal bake: 60s@110°C, Flood exposure: 500mJ/cm<sup>2</sup>, Dev: SP60s | ||
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