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Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
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|[http://www.allresist.com AllResist]
|[http://www.allresist.com AllResist]
|Both e-beam and DUV sensitive resist.
|Both e-beam and DUV sensitive resist.
|
|[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/SXAR-N8200-1_english_Allresist_product_information.pdf AR-N 8200 info]
|Labspin 2/3
|Labspin 2/3
|
|