Specific Process Knowledge/Lithography/EBeamLithography: Difference between revisions
Appearance
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|[http://www.allresist.com AllResist] | |[http://www.allresist.com AllResist] | ||
|Both e-beam and DUV sensitive resist. | |Both e-beam and DUV sensitive resist. | ||
| | |[https://www.allresist.com/wp-content/uploads/sites/2/2020/03/SXAR-N8200-1_english_Allresist_product_information.pdf AR-N 8200 info] | ||
|Labspin 2/3 | |Labspin 2/3 | ||
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