Specific Process Knowledge/Thermal Process/Dope with Boron: Difference between revisions
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==Doping with boron== | ==Doping with boron== | ||
''This section is written by DTU Nanolab internal'' | |||
The Boron Drive-in and Pre-dep furnace (A1) can be used to pre-deposit/dope silicon wafers with boron. | The Boron Drive-in and Pre-dep furnace (A1) can be used to pre-deposit/dope silicon wafers with boron. | ||