Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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To minimize stitching errors it is important to perform WF alignment. This can be done either by | To minimize stitching errors it is important to perform WF alignment. This can be done either by | ||
:1. Manual alignment to a particle or feature | :1. Manual alignment by image scan to a particle or feature | ||
:2. Automatic alignment by image scan of particle or feature | :2. Automatic alignment by image scan of particle or feature | ||
:3. Automatic alignment by line scan of feature (preferably a cross) | :3. Automatic alignment by line scan of feature (preferably a cross) | ||