Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further. | |||
Revision as of 21:43, 10 February 2011
This page is under construction
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.