Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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[[Image:eLINE-Plus.png|350x350px|right|frame|]] | [[Image:eLINE-Plus.png|350x350px|right|frame|]] | ||
<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | <span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]] | ||
=Process information for the Raith eLINE Plus system= | =Process information for the Raith eLINE Plus system= | ||
The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | The system was installed in the cleanroom in May 2022. As we get more familiar with the tool this page will be populated with relevant process information. | ||
== System overview == | == System overview == | ||