Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Difference between revisions
No edit summary |
No edit summary |
||
| Line 5: | Line 5: | ||
== Process D == | == Process D == | ||
{{Template:Author-jmli1}} | |||
<!--Checked for updates on 2/02-2023 - ok/jmli --> | |||
In this section the original version of process D is described. Since the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|change of the showerhead in December 2014]] an improved version of process D should be considered as well, see next section. | In this section the original version of process D is described. Since the [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange|change of the showerhead in December 2014]] an improved version of process D should be considered as well, see next section. | ||