Specific Process Knowledge/Etch/DRIE-Pegasus/Notation: Difference between revisions
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== How to read the | == How to read the notation on process recipes == | ||
<!-- revised 1/6-2015 by jmli --> | <!-- revised 1/6-2015 by jmli --> | ||
Look at two examples from the etch cycle of Step1 of the Process A shown in '''bold''' below: | |||
# The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | # The Platen power has the setting ''120 >> 140 (1.5s) 45 '' - it is to be interpreted as: | ||
## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ## In the first 1.5 seconds of the every cycle the platen power has a value that is ramped (indicated by >>) from 120 W initially to 150 W in the end | ||