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Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
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* MACS (Multiplex Atmospheric Cassette System)
* MACS (Multiplex Atmospheric Cassette System)


2.2 Wafer requirements
2.2 Wafer requirements


2.3 Process parameter space


2.3  Hardware
2.4 Standard processes


2.4 Standard processes
  2.4.1 Process A Large trench


  2.4.1 Process A Large trench
   2.4.1 Process B Via etch
   2.4.1 Process B Via etch


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3. System control
3. System control


Image: Description of the GUI
 


3.1 Manual processing
3.1 Manual processing
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