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Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

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Voltage - PEC
Voltage - PEC
Aperture and beam current (make own table)
{| border="2" cellspacing="1" cellpadding="1" align="center"
! style="background:orange; color:black" colspan="8" | Typical beam current [nA] as function of acceleration voltage and aperture
|- valign="top"
! style="background:silver; color:black" | Acc. voltage / Aperture
! style="background:silver; color:black" |  7 µm
! style="background:silver; color:black" | 10 µm
! style="background:silver; color:black" | 15 µm
! style="background:silver; color:black" | 20 µm
! style="background:silver; color:black" | 30 µm
! style="background:silver; color:black" | 60 µm
! style="background:silver; color:black" | 120 µm
|- valign="top"
! style="background:lightgrey; color:black" | 10 kV
| style="background:lightgrey; color:black" | 0.01
| style="background:lightgrey; color:black" | 0.02
| style="background:lightgrey; color:black" | 0.06
| style="background:lightgrey; color:black" | 0.10
| style="background:lightgrey; color:black" | 0.23
| style="background:lightgrey; color:black" | 0.99
| style="background:lightgrey; color:black" | 3.87
|- valign="top"
! style="background:Whitesmoke; color:black" | 10 kV HC
| style="background:WhiteSmoke; color:black"| 0.02
| style="background:WhiteSmoke; color:black"| 0.05
| style="background:WhiteSmoke; color:black"| 0.12
| style="background:WhiteSmoke; color:black"| 0.20
| style="background:WhiteSmoke; color:black"| 0.39
| style="background:WhiteSmoke; color:black"| 1.96
| style="background:WhiteSmoke; color:black"| 7.67
|- valign="top"
! style="background:lightgrey; color:black" | 20 kV
| style="background:lightgrey; color:black" | 0.02
| style="background:lightgrey; color:black" | 0.04
| style="background:lightgrey; color:black" | 0.09
| style="background:lightgrey; color:black" | 0.16
| style="background:lightgrey; color:black" | 0.36
| style="background:lightgrey; color:black" | 1.53
| style="background:lightgrey; color:black" | 6.06
|- valign="top"
! style="background:Whitesmoke; color:black" | 20 kV HC
| style="background:WhiteSmoke; color:black"| 0.03
| style="background:WhiteSmoke; color:black"| 0.08
| style="background:WhiteSmoke; color:black"| 0.18
| style="background:WhiteSmoke; color:black"|  0.32
| style="background:WhiteSmoke; color:black"|  0.61
| style="background:WhiteSmoke; color:black"| 3.03
| style="background:WhiteSmoke; color:black"| 11.9
|- valign="top"
! style="background:lightgrey; color:black" | 30 kV
| style="background:lightgrey; color:black" | 0.02
| style="background:lightgrey; color:black" | 0.04
| style="background:lightgrey; color:black" | 0.10
| style="background:lightgrey; color:black" | 0.17
| style="background:lightgrey; color:black" | 0.38
| style="background:lightgrey; color:black" | 1.65
| style="background:lightgrey; color:black" | 6.53
|- valign="top"
! style="background:Whitesmoke; color:black" | 30 kV HC
| style="background:WhiteSmoke; color:black"| 0.04
| style="background:WhiteSmoke; color:black"| 0.09
| style="background:WhiteSmoke; color:black"| 0.19
| style="background:WhiteSmoke; color:black"|  0.34
| style="background:WhiteSmoke; color:black"|  0.64
| style="background:WhiteSmoke; color:black"| 3.20
| style="background:WhiteSmoke; color:black"| 12.6
|}


==Dose information==  
==Dose information==