Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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! style="background:silver; color:black" | Acc. voltage / Aperture | ! style="background:silver; color:black" | Acc. voltage / Aperture | ||
! style="background:silver; color:black" | 7 µm | ! style="background:silver; color:black" | 7 µm | ||
! style="background:silver; color:black" | 10 µm | ! style="background:silver; color:black" | 10 µm | ||
! style="background:silver; color:black" | 15 µm | ! style="background:silver; color:black" | 15 µm | ||