Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
Appearance
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! style="background:Whitesmoke; color:black" | 10 kV HC | ! style="background:Whitesmoke; color:black" | 10 kV HC | ||
! style="background:WhiteSmoke; color:black"| | ! style="background:WhiteSmoke; color:black"| 0.02 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 0.05 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 0.12 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 0.20 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 0.39 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 1.96 | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| 7.67 | ||
|} | |} | ||