Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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! style="background:lightgrey; color:black" | 10 kV | ! style="background:lightgrey; color:black" | 10 kV | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.01 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.02 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.06 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.10 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.23 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 0.99 | ||
| style="background:lightgrey; color:black" | | | style="background:lightgrey; color:black" | 3.87 | ||
|- valign="top" | |- valign="top" | ||
! style="background:Whitesmoke; color:black" | | ! style="background:Whitesmoke; color:black" | 10 kV HC | ||
! style="background:WhiteSmoke; color:black" | | ! style="background:WhiteSmoke; color:black"| | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| | ||
| style="background:WhiteSmoke; color:black"| | | style="background:WhiteSmoke; color:black"| | ||
| style="background:WhiteSmoke; color:black"| | |||
| style="background:WhiteSmoke; color:black"| | |||
| style="background:WhiteSmoke; color:black"| | |||
| style="background:WhiteSmoke; color:black"| | |||
|- valign="top" | |- valign="top" | ||
! style="background:lightgrey; color:black" | 30 kV | ! style="background:lightgrey; color:black" | 30 kV | ||