Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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! style="background:silver; color:black" colspan="4" | Typical beam current [pA] as function of acceleration voltage and aperture] | ! style="background:silver; color:black" colspan="4" | Typical beam current [pA] as function of acceleration voltage and aperture] | ||
|- valign="top" | |- valign="top" | ||
! style="background:silver; color:black" | Acc. voltage | ! style="background:silver; color:black" | Acc. voltage / Aperture | ||
! style="background:silver; color:black" | | ! style="background:silver; color:black" | 10 | ||
! style="background:silver; color:black" | | ! style="background:silver; color:black" | 10 HC | ||
! style="background:silver; color:black" | | ! style="background:silver; color:black" | 20 | ||
! style="background:silver; color:black" | 20 HC | |||
! style="background:silver; color:black" | 30 | |||
! style="background:silver; color:black" | 30 HC | |||
|- valign="top" | |- valign="top" | ||
! style="background:lightgrey; color:black" | 10 kV | ! style="background:lightgrey; color:black" | 10 kV | ||