Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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1.4 Safety | 1.4 Safety | ||
1.5 Purpose | 1.5 Purpose | ||
The DRIE-Pegasus etch tool is a state-of-the-art silicon etch tool. | |||
1.6 Overview of equipment | 1.6 Overview of equipment | ||