Jump to content

Specific Process Knowledge/Lithography/ARN8200: Difference between revisions

Thope (talk | contribs)
No edit summary
Thope (talk | contribs)
Line 78: Line 78:


|}
|}
Area/curved element dose: Fully insoluble dose is around 150-180 µC/cm2.
Line dose: Fully insoluble dose is around 1700 µC/cm.
Dot dose: Fully insoluble dose is around 0.1 µC, this gives a circular diameter of 60 nm. Diameter can be varied by increasing dose, at 0.4 µC diameter is about 100 nm and at 1.2 µC it is about 170 nm.