Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions
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===Results=== | ===Results=== | ||
<gallery caption="Profile view" widths=" | <gallery caption="Profile view" widths="300px" heights="250px" perrow="3"> | ||
Image:S038116_01.jpg | Image:S038116_01.jpg | ||
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</gallery> | </gallery> | ||
<gallery caption=" | <gallery caption="Top view after resist strip" widths="300px" heights="250px" perrow="3"> | ||
Image:metalS038116top_03.jpg | Image:metalS038116top_03.jpg | ||