Specific Process Knowledge/Characterization/Profiler: Difference between revisions
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[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 P17 page in LabManager] | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 P17 page in LabManager] | ||
===Process information === | |||
*Info about [[/Stylus profiler measurement uncertainty|measurement accuracy]]. | |||
[[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access]] | |||
*Using the analysis software from outside the cleanroom: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]] | |||
*Info about making [[:File:2D stress section of P17 manual moved to Labadviser.docx|2D stress measurements]]. This text was removed from the user manual in LabManager as most users make 3D stress measurements. It counts as "3D" even if you just wish to make 2 perpendicular scans. A "2D" stress scan means a single line scan per wafer - the software does not even allow manual rotation of the stage for this type of scan. | |||
'''Acceptance test''' | '''Acceptance test''' | ||
* | *[[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf|Acceptance test results]] on the P17: | ||
*Vendor's own | *Vendor's own [[:File:Acceptance P17 ctd results.pdf|conformity test results]] after installation: | ||
===Equipment performance and process related parameters=== | ===Equipment performance and process related parameters=== | ||