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==Stylus Profiler (Tencor P17) ==
==Stylus Profiler (Tencor P17) ==


The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]]. Compared to the DektakXT, the P17 has more advanced options for stress measurements and allows the user to measure a stress map with up to 5° radial resolution. Programming a sequence of predefined scans in fixed locations on a wafer is also somewhat easier and the manual for doing it much better for the P17 than for the Dektak XTA. A disadvantage of the P17 is that is can be hard to locate structures as the maximum field of view of the camera is 1x1.5 mm. We recommend having a map of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast, and accurate, just like the DektakXT.
The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement|stress]].  
 
Compared to the DektakXT, the P17 has more advanced options for stress measurements: It allows the user to measure a stress map with up to 5° radial resolution. Programming and analyzing a sequence of predefined scans in fixed locations on a wafer is also easier and the manual for doing it much better for the P17 than for the DektakXT. A disadvantage of the P17 is that is can be hard to locate structures as the maximum field of view of the camera is 1x1.5 mm. We recommend having a map of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast, and accurate, just like the DektakXT.


'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''  
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*Acceptance measurements on the P17: [[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf]]
*Acceptance measurements on the P17: [[Media:Appendix 3 Acceptance test p17 final_v2_Completed.pdf]]
*Vendor's own conformity test results after installation: [[:File:Acceptance P17 ctd results.pdf]]
*Vendor's own conformity test results after installation: [[:File:Acceptance P17 ctd results.pdf]]
Info about measurement accuracy can be found [[/Stylus profiler measurement uncertainty|here]].


===Equipment performance and process related parameters===
===Equipment performance and process related parameters===
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|style="background:LightGrey; color:black"|Resolution Z
|style="background:LightGrey; color:black"|Resolution Z
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm.†
0.01 Å, 0.08 Å, or 0.6 Å according to the manufacturer for ranges 13 µm, 131 µm, and 1 mm. Note the smallest of these values are purely theoretical as they are far below the lab's noise level.
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|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
|style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
~ 2 % for the smallest range for a 1 micron step and ~ 1 % for a 25 micron step '''for well-defined steps that are easy to measure''', see section above.
~ 2 % for the smallest range for a 1 micron step and ~ 1 % for a 25 micron step '''for well-defined steps that are easy to measure''' (read about reducing and estimating the measurement uncertainty [[/Stylus profiler measurement uncertainty|here]])
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|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
|style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
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†The resolution for the smallest range is theoretical, as this is below the noise threshold at least in our lab.
===Height measurement accuracy for the Tencor P17 Stylus Profiler===
This is similar to what applies to the DektakXT as described above. The P17 has slightly better reproducibility but as the uncertainty for small steps is dominated by the uncertainty on the standard step height's actual size, this does not make much difference. Just as for the Dektak, the reproducibility of your own measurements of your particular step can make a relatively large contribution to the total uncertainty, Steps in real devices are not always as easy to measure or as well defined as our standard step height measurements.
<br clear="all" />


==Optical Profiler (Sensofar S Neox) ==  
==Optical Profiler (Sensofar S Neox) ==  
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The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.
The computer is not connected to the network but data can be saved on a dedicated USB and transfered to a computer on the network.
Info about measurement accuracy can be found [[/Stylus profiler measurement uncertainty|here]].


===Equipment performance and process related parameters===
===Equipment performance and process related parameters===
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