Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions

@@ Line 43: / Line 43: @@
 ! style="background:silver; color:black" | AR-P 6200.09 (180 nm)
 ! style="background:silver; color:black" | PMMA 950k
-! style="background:silver; color:black" | AR-N 8200.xx
+! style="background:silver; color:black" | AR-N 8200.06
 |- valign="top"
 ! style="background:lightgrey; color:black" | 10 kV
@@ Line 58: / Line 58: @@
 | style="background:lightgrey; color:black" | 100
 | style="background:lightgrey; color:black" |
-| style="background:lightgrey; color:black" |
+| style="background:lightgrey; color:black" | 200
 |}