Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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The software allows the user to define different doses for the four different types of elements and thus it is essential to know how the design is drawn and interpreted. The units used are: | The software allows the user to define different doses for the four different types of elements and thus it is essential to know how the design is drawn and interpreted. The units used are: | ||
*Area dose [µC/cm2], | *Area dose [µC/cm2], | ||
*Curved element dose [µC/cm2] | *Curved element dose [µC/cm2] | ||