Specific Process Knowledge/Lithography/EBeamLithography/eLINE: Difference between revisions
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*Area: Polygons | *Area: Polygons | ||
*Curved elements: Elements that have an adjustable radius | *Curved elements: Elements that have an adjustable radius | ||
Line: Zero-width line | *Line: Zero-width line | ||
Dot: Single point/vertice element | *Dot: Single point/vertice element | ||
The software allows the user to define different doses for the four different types of elements and thus it is essential to know how the design is drawn and interpreted. The units used are: | The software allows the user to define different doses for the four different types of elements and thus it is essential to know how the design is drawn and interpreted. The units used are: | ||
*Area dose [µC/cm2], | *Area dose [µC/cm2], | ||
*Curved element dose [µC/cm2] | *Curved element dose [µC/cm2] | ||
*Line dose [pC/cm] | *Line dose [pC/cm] | ||
*Dot dose [pC]. | *Dot dose [pC]. | ||
Also notice that the unit prefix changes from micro to pico. We recommend setting the same dose for area and curved elements. | Also notice that the unit prefix changes from micro to pico. We recommend setting the same dose for area and curved elements. | ||